منابع مشابه
Microstructure Evolution in Damascene Interconnects
We have developed a 3-dimensional computer simulation tool to study the characteristics of microstructure evolution in damascene interconnects. This tool is based on the Monte Carlo method, and the characteristics of the microstructure evolution have a significant impact on the interconnect reliability. Our simulation results show that it may not be possible to obtain a bamboo microstructure th...
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متن کاملDamascene-patterned optical anisotropy in integrated photonics
We propose, simulate and experimentally demonstrate a method for realizing spatially-mapped birefringence onto integrated photonic devices and circuits. The fabrication method is based on applying a damascene-like process to dielectric film stacks to form anisotropic optical waveguides. An integrated polarizing beam-splitter (PBS) is realized with unprecedented performance: a record 0.52 octave...
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متن کاملMold Fabrication for 3D Dual Damascene Imprinting
Previously, a damascene process based on nanoimprint lithography has been proposed (Schmid G M, et al. in J Vac Sci Technol B 24(3) 1283, 2006) to greatly reduce the fabrication steps of metal interconnection in integrated circuit. For such a process to become a viable technique, a mold having two pattern levels with precise alignment between them must be fabricated first. To this end, this wor...
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ژورنال
عنوان ژورنال: Bulletin of the Japan Institute of Metals
سال: 1981
ISSN: 0021-4426,1884-5835
DOI: 10.2320/materia1962.20.347